Thermal engineering of interface adhesion for efficient transfer of CVD-grown TMDs
Source abstract
Abstract
The numerous advantages of growing two-dimensional materials via chemical vapor deposition have ignited increasing interest within both industrial and academic communities. However, transferring large, defect-free areas remains a significant challenge to fully realize their technological potential. Various methods either exploit specific characteristics of a material, are technically complex, or require expensive equipment. Here, we present a method that simplifies and enhances transfer versatility, addressing the cost-effectiveness, adaptability, and yield limitations of conventional methods. Our approach leverages gentle heating of the substrate to weaken the adhesion between the two-dimensional material and the substrate. The role of thermal fluctuations is described by a theoretical model based on the elastic properties of the material and the interface adhesion energy. Our method works for three of the most common materials and scales up to mm 2 . Comparison of optical properties between transferred and as-grown material confirms the quality of our dry transfer method.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Adhesion, Friction, and Surface Interactions · 2D Materials and Applications · Surface Modification and Superhydrophobicity
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (82)
Show source-provided references
1. Chaves, A. et al. Bandgap engineering of two-dimensional semiconductor materials. npj 2D Mater. Appl. 4, 29 (2020).10.1038/s41699-020-00162-4 ↗
2. Wang, Q. H., Kalantar-Zadeh, K., Kis, A., Coleman, J. N. & Strano, M. S. Electronics and optoelectronics of two-dimensional transition metal dichalcogenides. Nat. Nanotechnol. 7, 699–712 (2012).10.1038/nnano.2012.193 ↗
3. Kamila, S., Kandasamy, M., Chakraborty, B. & Jena, B. K. Recent development on engineered TMDs for charge storage performance: experimental and theoretical investigations. J. Energy Storage 89, 111614 (2024).10.1016/j.est.2024.111614 ↗
4. Aftab, S., Iqbal, M. Z., Hussain, S., Hegazy, H. H. & Saeed, M. A. Recent development on engineered TMDs for charge storage performance: experimental and theoretical investigations. Nano Energy 108, 108249 (2023).10.1016/j.nanoen.2023.108249 ↗
5. Zhang, C. et al. Recent progress on two-dimensional van der Waals heterostructures for photocatalytic water splitting: a selective review. J. Phys. D. Appl. Phys. 56, 483001–483001 (2023).10.1088/1361-6463/acf506 ↗
6. Chen, M., Chang, W., Zhang, J., Zhao, W. & Chen, Z. Preparation of a hybrid TiO2 and 1T/2H-MoS2 photocatalyst for the degradation of tetracycline hydrochloride. ACS Omega 8, 15458–15466 (2023).10.1021/acsomega.3c00730 ↗
7. Ni, J., Quintana, M. & Song, S. Using van der Waals heterostructures based on two-dimensional InSe−XS(X = Mo, W) as promising photocatalysts for hydrogen production. J. Mater. Chem. 8, 12509–12515 (2020).10.1039/D0TC02874F ↗
8. Amaral, L. O. & Daniel-da-Silva, A. L. MoS2 and MoSe2 nanocomposites for adsorption and photodegradation of water pollutants: a review. Molecules 27, 6782–6782 (2022).10.3390/molecules27206782 ↗
9. Khan, R. & Barua, S.Two-Dimensional Nanostructures for Biomedical Technology: a Bridge between Material Science and Bioengineering 281–302 (Elsevier, 2019).
10. Shanmugam, V. et al. A review of the synthesis, properties, and applications of 2D materials. Part. Part. Syst. Charact. 39, 2200031 (2022).10.1002/ppsc.202200031 ↗
11. Turchanin, A. & George, A. Tailored growth of transition metal dichalcogenides’ monolayers by chemical vapor deposition. Small 21, 2403089 (2024).10.1002/smll.202403089 ↗
12. Fu, J. et al. Oriented lateral growth of two-dimensional materials on c-plane sapphire. Nat. Nanotechnol. 18, 1289–1294 (2023).10.1038/s41565-023-01445-9 ↗
13. Lan, C. et al. Enhanced epitaxial growth of two-dimensional monolayer WS2 film with large single domains. Appl. Mater. Today 25, 101234 (2021).10.1016/j.apmt.2021.101234 ↗
14. Yang, Y. et al. In situ manipulation of van der Waals heterostructures for twistronics. Sci. Adv. 6, eabd3655 (2020).10.1126/sciadv.abd3655 ↗
15. Hennighausen, Z. & Kar, S. Twistronics: a turning point in 2D quantum materials. Electron. Struct. 3, 014004 (2021).10.1088/2516-1075/abd957 ↗
16. Liu, X., Huang, K., Zhao, M., Li, F. & Liu, H. A modified wrinkle-free MoS2 film transfer method for large area high mobility field-effect transistor. Nanotechnology 31, 055707 (2019).10.1088/1361-6528/ab49b8 ↗
17. Ma, D. et al. A universal etching-free transfer of MoS2 films for applications in photodetectors. Nano Res. 8, 3662–3672 (2015).10.1007/s12274-015-0866-z ↗
18. Gao, Y. et al. Large-area synthesis of high-quality and uniform monolayer WS2 on reusable Au foils. Nat. Commun. 6, 8569 (2015).10.1038/ncomms9569 ↗
19. Gurarslan, A. et al. Surface-energy-assisted perfect transfer of centimeter-scale monolayer and few-layer MoS2 films onto arbitrary substrates. ACS Nano 8, 11522–11528 (2014).10.1021/nn5057673 ↗
20. Van Ngoc, H., Qian, Y., Han, S. K. & Kang, D. J. PMMA-etching-free transfer of wafer-scale chemical vapor deposition two-dimensional atomic crystal by a water-soluble polyvinyl alcohol polymer method. Sci. Rep. 6, 33096 (2016).10.1038/srep33096 ↗
21. Xie, L. et al. A facile and efficient dry transfer technique for two-dimensional van der Waals heterostructure. Chin. Phys. B 26, 087306 (2017).10.1088/1674-1056/26/8/087306 ↗
22. Zhang, F., Erb, C., Runkle, L., Zhang, X. & Alem, N. Etchant-free transfer of 2D nanostructures. Nanotechnology 29, 025602 (2017).10.1088/1361-6528/aa9c21 ↗
23. Mootheri, V. et al. Graphene based van der Waals contacts on MoS2 field effect transistors. 2D Materials 8, 015003 (2020).10.1088/2053-1583/abb959 ↗
24. Velicky, M. et al. Mechanism of gold-assisted exfoliation of centimeter-sized transition-metal dichalcogenide monolayers. ACS Nano 12, 10463–10472 (2018).10.1021/acsnano.8b06101 ↗
25. Jia, H. et al. Large-scale arrays of single-and few-layer MoS2 nanomechanical resonators. Nanoscale 8, 10677–10685 (2016).10.1039/C6NR01118G ↗
26. Zhang, T. et al. Clean transfer of 2D transition metal dichalcogenides using cellulose acetate for atomic resolution characterizations. ACS Appl. Nano Mater. 2, 5320–5328 (2019).10.1021/acsanm.9b01257 ↗
27. Rebollo, I., Rodrigues-Machado, F., Wright, W., Melin, G. & Champagne, A. Thin-suspended 2D materials: facile, versatile, and deterministic transfer assembly. 2D Mater. 8, 035028 (2021).10.1088/2053-1583/abf98c ↗
28. Yang, B. et al. Strong electron-hole symmetric Rashba spin-orbit coupling in graphene/monolayer transition metal dichalcogenide heterostructures. Phys. Rev. B 96, 041409 (2017).10.1103/PhysRevB.96.041409 ↗
29. Zhang, L. et al. Damage-free and rapid transfer of CVD-grown two-dimensional transition metal dichalcogenides by dissolving sacrificial water-soluble layers. Nanoscale 9, 19124–19130 (2017).10.1039/C7NR06928F ↗
30. Sharma, M., Singh, A., Aggarwal, P. & Singh, R. Large-area transfer of 2D TMDCs assisted by a water-soluble layer for potential device applications. ACS Omega 7, 11731–11741 (2022).10.1021/acsomega.1c06855 ↗
31. Liu, H. et al. Controlled adhesion of ice—toward ultraclean 2D materials. Adv. Mater. 35, 2210503 (2023).10.1002/adma.202210503 ↗
32. Kim, H. H. et al. Clean transfer of wafer-scale graphene via liquid phase removal of polycyclic aromatic hydrocarbons. ACS Nano 9, 4726–4733 (2015).10.1021/nn5066556 ↗
33. Liu, H., Zhao, J. & Ly, T. H. Clean transfer of two-dimensional materials: a comprehensive review. ACS Nano 18, 11573–11597 (2024).10.1021/acsnano.4c01000 ↗
34. Cheliotis, I. & Zergioti, I. A review on transfer methods of two-dimensional materials. 2D Materials (2024).10.1088/2053-1583/ad2f43 ↗
35. Dong, W., Dai, Z., Liu, L. & Zhang, Z. Toward clean 2D materials and devices: recent progress in transfer and cleaning methods. Adv. Mater. 36, 2303014 (2024).10.1002/adma.202303014 ↗
36. Naumis, G. G. Electronic properties of 2D materials and its heterostructures: a minimal review. Rev. Mex. Fís. 67, 5 (2021).10.1016/B978-0-12-818475-2.00005-2 ↗
37. Wang, P., Gao, W. & Huang, R. Entropic effects of thermal rippling on van der Waals interactions between monolayer graphene and a rigid substrate. J. Appl. Phys. 119, 074305 (2016).10.1063/1.4941987 ↗
38. Chang, Z., Yang, R. & Wei, Y. The linear-dependence of adhesion strength and adhesion range on temperature in soft membranes. J. Mech. Phys. Solids 132, 103697 (2019).10.1016/j.jmps.2019.103697 ↗
39. Yan, W., Liu, J., Ouyang, W. & Liu, Z. Moiré superlattice effects on interfacial mechanical behavior: a concise review. Interdiscip. Mater. 3, 343–357 (2024).
40. Lara-Alfaro, H. F. et al. In situ and real-time optical study of passive chemical etching of porous silicon and its impact on the fabrication of thin layers and multilayers. J. Appl. Phys. 134, 8 (2023).10.1063/5.0160447 ↗
41. Mann, G. A Manual for Librarians and Students Describing in Detail the History, Methods, and Applications of Printing and Paper Making (Grafton, 1952).
42. Abadi, M., Serag, M. F. & Habuchi, S. Entangled polymer dynamics beyond reptation. Nat. Commun. 9, 5098 (2018).10.1038/s41467-018-07546-7 ↗
43. Tejedor, A. R. & Ramirez, J. Reptation of active entangled polymers. Macromolecules 52, 8788–8792 (2019).10.1021/acs.macromol.9b01994 ↗
44. Masaro, L. & Zhu, X. Physical models of diffusion for polymer solutions, gels and solids. Prog. Polym. Sci. 24, 731–775 (1999).10.1016/S0079-6700(99)00016-7 ↗
45. Zhao, Y. et al. Large-area transfer of two-dimensional materials free of cracks, contamination and wrinkles via controllable conformal contact. Nat. Commun. 13, 4409 (2022).10.1038/s41467-022-31887-z ↗
46. Poddar, P. K. et al. Resist-free lithography for monolayer transition metal dichalcogenides. Nano Lett. 22, 726–732 (2022).10.1021/acs.nanolett.1c04081 ↗
47. Wang, X. et al. Effects of solvents and polymer on photoluminescence of transferred WS2 monolayers. J. Vacuum Sci. Technol. B 37, 052902 (2019).10.1116/1.5094543 ↗
48. Matthews, S., Zhao, C., Zeng, H. & Bright, F. V. Effects of acetone vapor on the exciton band photoluminescence emission from single-and few-layer WS2 on template-stripped gold. Sensors 19, 1913 (2019).10.3390/s19081913 ↗
49. Verhagen, T., Guerra, V. L., Haider, G., Kalbac, M. & Vejpravova, J. Towards the evaluation of defects in MoS2 using cryogenic photoluminescence spectroscopy. Nanoscale 12, 3019–3028 (2020).10.1039/C9NR07246B ↗
50. Michail, A. et al. Tuning the photoluminescence and Raman response of single-layer WS2 crystals using biaxial strain. J. Phys. Chem. C 127, 3506–3515 (2023).10.1021/acs.jpcc.2c06933 ↗
51. Dadgar, A. et al. Strain engineering and Raman spectroscopy of monolayer transition metal dichalcogenides. Chem. Mater. 30, 5148–5155 (2018).10.1021/acs.chemmater.8b01672 ↗
52. McCreary, K. M. et al. The effect of preparation conditions on Raman and photoluminescence of monolayer WS2. Sci. Rep. 6, 35154 (2016).10.1038/srep35154 ↗
53. Chernikov, A. et al. Electrical tuning of exciton binding energies in monolayer WS2. Phys. Rev. Lett. 115, 126802 (2015).10.1103/PhysRevLett.115.126802 ↗
54. Gaur, A. P. et al. Manipulation of exciton and trion quasiparticles in monolayer WS2 via charge transfer. Appl. Phys. Lett. 115, 173103 (2019).10.1063/1.5113775 ↗
55. Mitioglu, A. et al. Optical manipulation of the exciton charge state in single-layer tungsten disulfide. Phys. Rev. B—Condens. Matter Mater. Phys. 88, 245403 (2013).10.1103/PhysRevB.88.245403 ↗
56. Fang, L. et al. Identification of active sites for thermal oxidation-induced doping and etching in CVD-grown monolayer transition metal dichalcogenides. ACS Appl. Nano Mater. 7, 5063–5073 (2024).10.1021/acsanm.3c05817 ↗
57. Su, L., Yu, Y., Cao, L. & Zhang, Y. Effects of substrate type and material-substrate bonding on high-temperature behavior of monolayer WS2. Nano Res. 8, 2686–2697 (2015).10.1007/s12274-015-0775-1 ↗
58. Buscema, M., Steele, G. A., Van Der Zant, H. S. & Castellanos-Gomez, A. The effect of the substrate on the Raman and photoluminescence emission of single-layer MoS2. Nano Res. 7, 561–571 (2014).10.1007/s12274-014-0424-0 ↗
59. Berkdemir, A. et al. Identification of individual and a few layers of WS2 using Raman spectroscopy. Sci. Rep. 3, 1755 (2013).10.1038/srep01755 ↗
60. Michail, A., Delikoukos, N., Parthenios, J., Galiotis, C. & Papagelis, K. Optical detection of strain and doping inhomogeneities in single-layer MoS2. Appl. Phys. Lett. 108, 173102 (2016).10.1063/1.4948357 ↗
61. Parkin, W. M. et al. Raman shifts in electron-irradiated monolayer MoS2. ACS Nano 10, 4134–4142 (2016).10.1021/acsnano.5b07388 ↗
62. Cui, Q. et al. Robust and high photoluminescence in WS2 monolayer through in situ defect engineering. Adv. Funct. Mater. 31, 2105339 (2021).10.1002/adfm.202105339 ↗
63. Kim, M. S. et al. Biexciton emission from edges and grain boundaries of triangular WS2 monolayers. ACS Nano 10, 2399–2405 (2016).10.1021/acsnano.5b07214 ↗
64. Cohen, A. et al. Tungsten oxide mediated quasi-van der Waals epitaxy of WS2 on sapphire. ACS Nano 17, 5399–5411 (2023).10.1021/acsnano.2c09754 ↗
65. Zhou, J. et al. A library of atomically thin metal chalcogenides. Nature 556, 355–359 (2018).10.1038/s41586-018-0008-3 ↗
66. Ahmadpoor, F., Wang, P., Huang, R. & Sharma, P. Thermal fluctuations and effective bending stiffness of elastic thin sheets and graphene: a nonlinear analysis. J. Mech. Phys. Solids 107, 294–319 (2017).10.1016/j.jmps.2017.07.011 ↗
67. Gao, W. & Huang, R. Thermomechanics of monolayer graphene: Rippling, thermal expansion and elasticity. J. Mech. Phys. Solids 66, 42–58 (2014).10.1016/j.jmps.2014.01.011 ↗
68. Sanchez, D. A. et al. Mechanics of spontaneously formed nanoblisters trapped by transferred 2d crystals. Proc. Natl Acad. Sci. 115, 7884–7889 (2018).10.1073/pnas.1801551115 ↗
69. Li, N., Wu, H., Sun, C. & Zhao, J. Adhesion of 2d materials: measurement and modulation. Acta Mech. Solida Sin. 38, 252–274 (2024).10.1007/s10338-024-00552-x ↗
70. Yang, W. et al. The interfacial adhesion of contacting pairs in van der Waals materials. Appl. Surf. Sci. 598, 153739 (2022).10.1016/j.apsusc.2022.153739 ↗
71. Koós, A. A. et al. STM study of the MoS2 flakes grown on graphite: a model system for atomically clean 2D heterostructure interfaces. Carbon 105, 408–415 (2016).10.1016/j.carbon.2016.04.069 ↗
72. Li, Y. et al. Measurement of the optical dielectric function of monolayer transition-metal dichalcogenides: MoS2, MoSe2, WS2, and WSe2. Phys. Rev. B 90, 205422 (2014).10.1103/PhysRevB.90.205422 ↗
73. Ermolaev, G. A., Yakubovsky, D. I., Stebunov, Y. V., Arsenin, A. V. & Volkov, V. S. Spectral ellipsometry of monolayer transition metal dichalcogenides: analysis of excitonic peaks in dispersion. J. Vacuum Sci. Technol. B 38, 014002 (2020).10.1116/1.5122683 ↗
74. Sohn, H. Chemical sensors based on distributed Bragg reflector porous silicon smart particles. J. Chosun Nat. Sci. 8, 67–74 (2015).10.13160/ricns.2015.8.1.67 ↗
75. Ruminski, A. M., Moore, M. M. & Sailor, M. J. Humidity-compensating sensor for volatile organic compounds using stacked porous silicon photonic crystals. Adv. Funct. Mater. 18, 3418–3426 (2008).10.1002/adfm.200701494 ↗
76. Kim, H.-J., Kim, Y.-Y., Lee, K.-W. & Park, S.-H. A distributed Bragg reflector porous silicon layer for optical interferometric sensing of organic vapor. Sens. Actuators B: Chem. 155, 673–678 (2011).10.1016/j.snb.2011.01.028 ↗
77. Xu, Z.-Q. et al. Synthesis and transfer of large-area monolayer WS2 crystals: moving toward the recyclable use of sapphire substrates. ACS Nano 9, 6178–6187 (2015).10.1021/acsnano.5b01480 ↗
78. do Nascimento Barbosa, A., Mendoza, C. A. D., Figueroa, N. J. S., Terrones, M. & Júnior, F. L. F. Luminescence enhancement and Raman characterization of defects in WS2 monolayers treated with low-power N2 plasma. Appl. Surf. Sci. 535, 147685 (2021).10.1016/j.apsusc.2020.147685 ↗
79. Li, S. et al. Wafer-scale and deterministic patterned growth of monolayer MoS2 via vapor–liquid–solid method. Nanoscale 11, 16122–16129 (2019).10.1039/C9NR04612G ↗
80. Li, S. et al. Mixed-salt enhanced chemical vapor deposition of two-dimensional transition metal dichalcogenides. Chem. Mater. 33, 7301–7308 (2021).10.1021/acs.chemmater.1c01652 ↗
81. Katsidis, C. C. & Siapkas, D. I. General transfer-matrix method for optical multilayer systems with coherent, partially coherent, and incoherent interference. Appl. Opt. 41, 3978–3987 (2002).10.1364/AO.41.003978 ↗
82. Polfus, J. M. et al. Temperature-Dependent Adhesion in van der {W}aals Heterostructures. Adv. Mater. Interfaces 8, 2100838 (2021).10.1002/admi.202100838 ↗