journal article·2014-10Open access

Extremely anisotropic single-crystal growth in nanotwinned copper

Chia-Ling Lu, Han-Wen Lin, Chien-Min Liu, Yi-Sa Huang, Tien-Lin Lu, Tao-Chi Liu, Hsiang-Yao Hsiao, Chih Chen, Jui-Chao Kuo, King-Ning Tu

NPG Asia Materials· Volume 6· Issue 10

Abstract

By electroplating the unidirectionally <111>-oriented nanotwinned and fine-grained Cu on a Si wafer surface and followed by annealing at 400–500 °C up to an hour, we grow a number of extremely large <100>-oriented single crystals of Cu of sizes from 200 to 400 μm, as illustrated by the left figure. By patterning the nanotwinned Cu film (middle figure), we grow an array of <100>-oriented single crystals of Cu of sizes from 25 to 100 μm on Si after the annealing, as shown in the right figure.
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Research context

OpenAlex topics: Copper Interconnects and Reliability · Electronic Packaging and Soldering Technologies · Microstructure and mechanical properties

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

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