Highly sensitive and flexible pressure sensors using position- and dimension-controlled ZnO nanotube arrays grown on graphene films

Abstract A facile and novel technique for the fabrication of pressure sensors is reported based on the hybridization of one-dimensional nanomaterials and two-dimensional graphene film. In particular, piezoelectric pressure sensors are fabricated by using vertically aligned and position- and dimension-controlled ZnO nanotube arrays grown on graphene layers. Graphene layers act not only as substrates for catalyst-free growth of high-quality ZnO nanotubes but also as flexible conduction channels connecting ZnO nanotubes and metal electrodes. Freestanding and flexible sensors have been efficiently obtained via mechanical lift-off of hybrid ZnO nanotube/graphene film structures and by exploiting the weak van der Waals forces existing between the graphene film and the original substrates. A prototype of such devices shows a high pressure sensitivity (−4.4 kPa⁻¹), which would enable the detection of weak flows of inert gas. The relatively low wall thickness and large length of the ZnO nanotubes suggest a relatively high sensitivity to external pressures. The obtained nanotube sensors are attached to the philtrum and wrist of a volunteer and used to monitor his breath and heart rate. Overall, the prototype hybrid sensing device has great potential as wearable technology, especially in the sector of advanced healthcare devices.