LINE-FOCUS-BEAM ACOUSTIC MICROSCOPY AND ITS APPLICATION TO CHARACTERIZATION OF PIEZOELECTRIC SINGLE CRYSTALS
Source abstract
Abstract
Abstract Line-focus-beam (LFB) acoustic microscopy with high measurement accuracy, applicable to quantitative characterization of electronic device materials, has been developed and this paper is a brief review of the method and system. The application to quantitative evaluation of elastic properties of piezoelectric single crystals of LiNbO3, and LiTaO3, focusing on the subjects of the elastic inhomogeneity and the congruent chemical composition. which present serious problems during the mass production in industry, is described to demonstrate the usefulness as a new analytical technique.
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Research context
OpenAlex topics: Acoustic Wave Resonator Technologies · Ferroelectric and Piezoelectric Materials · Ultrasonics and Acoustic Wave Propagation
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (25)
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