MEASUREMENT OF THE YOUNG'S MODULI OF TiC COATED FILM BY X-RAY METHOD

Abstract Titanium carbide was coated on tool steel by chemical vapor deposition. A four-point bending test method was used to evaluate precisely mechanical Young's modulus of TiC coated film. The X-ray method was successfully used to measure the residual stress in the coated film by the Sin2ψ method. The X-ray Young's modulus measured was 494 GPa which was lower than the mechanical determination value of 555 GPa. The residual stress in the film measured by X-rays was a compression of 2.24 GPa.