The Characterisation of Ceramic Materials by Sem Andspm Techniques

Abstract Scanning electron microscopy (SEM) and scanning probe microscopy (SPM) techniques. such as atomic force microscopy (AFM), are proving particularly versatile in providing information relevant to understanding microstructural detail and evolution, deformation mechanisms and the distribution and role of impurities in materials, Also, SPM and SEM techniquescan provide differing and often complementary sample information not least in the excellent x, y and z resolution available in AFM images compared to the difficulties of obtaining quantitative z-information from high depth-of-field SEM images. The inherently high spatial resolutions of these techniques are particularly valuable as the microstructural scale of new and enhanced materials, such as engineering ceramics, decreases. As materials, engineering ceramics pose a number of specific problems for the microscopist. including high electrical resistivities, high hardnesses and a critical dependence on trace impurity levels. This paper demonstrates the range of critically useful—and often unique—infonnation accessible when SEM and SPM techniques are used to study such ceramic materials.