article·2000-01-01

REVIEW OF THE TETRAHEDRAL AMORPHOUS CARBON FILM

Wei Ai

Abstract

Tetrahedral amorphous carbon films (ta C) have become a new type of wide band gap amorphous materials because of its valuable physical and chemical properties. In this paper, the deposition process, growth mechanism, basic properties and application of ta C films are reviewed.
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Research context

OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics

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