Resonant Transducers Consisting of Graphene Ribbons with Attached Proof Masses for NEMS Sensors
Source abstract
Abstract
The unique mechanical and electrical properties of graphene make it an exciting material for nanoelectromechanical systems (NEMS). NEMS resonators with graphene springs facilitate studies of graphene's fundamental material characteristics and thus enable innovative device concepts for applications such as sensors. Here, we demonstrate resonant transducers with ribbon-springs made of double-layer graphene and proof masses made of silicon and study their nonlinear mechanics at resonance both in air and in vacuum by laser Doppler vibrometry. Surprisingly, we observe spring-stiffening and spring-softening at resonance, depending on the graphene spring designs. The measured quality factors of the resonators in a vacuum are between 150 and 350. These results pave the way for a class of ultraminiaturized nanomechanical sensors such as accelerometers by contributing to the understanding of the dynamics of transducers based on graphene ribbons with an attached proof mass.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Mechanical and Optical Resonators · Carbon Nanotubes in Composites · Advanced MEMS and NEMS Technologies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Advanced Research Institute of Multidisciplinary Sciences, Beijing Institute of Technology, Beijing 100081, China
Division of Micro and Nanosystems, School of Electrical Engineering and Computer Science, KTH Royal Institute of Technology, SE-10044 Stockholm, Sweden
Advanced NEMS Group, École Polytechnique Fédérale de Lausanne (EPFL), 1015 Lausanne, Switzerland
School of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China
Funding
Vetenskapsr?det · Schweizerischer Nationalfonds zur F?rderung der Wissenschaftlichen Forschung · National Outstanding Youth Science Fund Project of National Natural Science Foundation of China · Beijing Institute of Technology · Beijing Municipal Natural Science Foundation · National Natural Science Foundation of China · Beijing Institute of Technology Science and Technology Innovation Plan
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