Fabrication of PDMS nano-mold by deposition casting method
Source abstract
Abstract
Abstract Nanoimprinting is a high-throughput, low-cost, and high-precision nanofabrication technology. In this article, we proposed a method for fabricating PDMS nano-molds by side etching deposition casting. During the fabrication process, we used a wet etching method to obtain the etching width, a nanogap was formed when the deposition process was completed, and finally, the nanochannel was obtained by the lift-off method. Then, the casting method was used to replicate the nanochannel pattern to create the polydimethylsiloxane (PDMS) nano-mold. The effect of development time on the morphology of photoresist patterns was studied, the relationship between etching time and etching width was analyzed, and the effect of different deposition methods on the formation of nanochannels was studied. We believe that the proposed method can play a certain role in promoting the development of nanotechnology and nanoscience.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Nanofabrication and Lithography Techniques · Additive Manufacturing and 3D Printing Technologies · Nanowire Synthesis and Applications
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
School of Mechanical and Electrical Engineering, Soochow University , Suzhou , Jiangsu, 215137 , China
References (38)
Show source-provided references
1. Kasani S, Curtin K, Wu N. A review of 2D and 3D plasmonic nanostructure array patterns: fabrication, light management and sensing applications. Nanophotonics. 2019;8(12):2065–89.10.1515/nanoph-2019-0158 ↗
2. Zhao ZJ, Ahn J, Hwang SH, Ko J, Jeong Y, Bok M, et al. Large-area nanogap-controlled 3D nanoarchitectures fabricated via layer-by-layer nanoimprint. ACS Nano. 2021;15(1):503–14.10.1021/acsnano.0c05290 ↗
3. Jia Y, Chen F. Recent progress on femtosecond laser micro-/nano-fabrication of functional photonic structures in dielectric crystals: A brief review and perspective. APL Photonics. 2023;8(9):090901.10.1063/5.0160067 ↗
4. Zhang X, Liu H, Jiang L. Wettability and applications of nanochannels. Adv Mater. 2019;31(5):e1804508.10.1002/adma.201804508 ↗
5. Feng HQ, Shen ST, Jin ML, Zhang QL, Liu MJ, Wu ZH, et al. Microwell confined electro-coalescence for rapid formation of high-throughput droplet array. Small. 2023;19(45):2302998.10.1002/smll.202302998 ↗
6. Rahman M, Islam KR, Islam MR, Islam MJ, Kaysir MR, Akter M, et al. A critical review on the sensing, control, and manipulation of single molecules on optofluidic devices. Micromachines. 2022;13(6):968.10.3390/mi13060968 ↗
7. Higgins SG, Becce M, Belessiotis-Richards A, Seong H, Sero JE, Stevens MM. High-aspect-ratio nanostructured surfaces as biological metamaterials. Adv Mater. 2020;32(9):e1903862.10.1002/adma.201903862 ↗
8. Huang L, Yang DY, Yu ZM, He JX, Chen Y, Zhou JH. Deep learning-aided high-throughput screening of time-resolved protein crystallization on programmable microliter-droplet systems. Chem Eng J. 2022;450:138267.10.1016/j.cej.2022.138267 ↗
9. Alfaro JA, Bohländer P, Dai MJ, Filius M, Howard CJ, van Kooten XF, et al. The emerging landscape of single-molecule protein sequencing technologies. Nat Methods. 2021;18(6):604–17.10.1038/s41592-021-01143-1 ↗
10. Mahajan S, Sharkins JA, Hunter AH, Avishai A, Ereifej ES. Focused ion beam lithography to etch nano-architectures into microelectrodes. J Visualized Exp. 2020;155:e60004.10.3791/60004 ↗
11. Manoccio M, Esposito M, Passaseo A, Cuscuna M, Tasco V. Focused ion beam processing for 3D chiral photonics nanostructures. Micromachines. 2021;12(1):6.10.3390/mi12010006 ↗
12. He S, Tian R, Wu W, Li W-D, Wang D. Helium-ion-beam nanofabrication: extreme processes and applications. Int J Extreme Manuf. 2021;3(1):012001.10.1088/2631-7990/abc673 ↗
13. Li P, Chen S, Dai H, Yang Z, Chen Z, Wang Y, et al. Recent advances in focused ion beam nanofabrication for nanostructures and devices: fundamentals and applications. Nanoscale. 2021;13(3):1529–65.10.1039/D0NR07539F ↗
14. Tavares L, Chiriaev S, Adashkevich V, Taboryski R, Rubahn HG. Height patterning of nanostructured surfaces with a focused helium ion beam: a precise and gentle non-sputtering method. Nanotechnology. 2020;31(14):145303.10.1088/1361-6528/ab6679 ↗
15. Petrov YV, Grigoryev EA, Baraban AP. Helium focused ion beam irradiation with subsequent chemical etching for the fabrication of nanostructures. Nanotechnology. 2020;31(21):215301.10.1088/1361-6528/ab6fe3 ↗
16. Jee H, Park M-J, Jeon K, Jeong C, Lee J. Combining interference lithography and two-photon lithography for fabricating large-area photonic crystal structures with controlled defects. Appl Sciences-Basel. 2021;11(14):6559.10.3390/app11146559 ↗
17. Valsecchi C, Gomez Armas LE, de Menezes JW. Large area nanohole arrays for sensing fabricated by interference lithography. Sensors. 2019;19(9):2182.10.3390/s19092182 ↗
18. Hreshchuk OM, Yukhymchuk VO, Dzhagan VM, Danko VA, Minko VI, Indutnyi IZ, et al. Efficient SERS substrates based on laterally ordered gold nanostructures made using interference lithography. Semicond Phys Quantum Electron Optoelectron. 2019;22(2):215–23.10.15407/spqeo22.02.215 ↗
19. Holmes J, Zhang M, Greibe T, Schaich WL, Jacobson SC, Dragnea B. Mapping complex profiles of light intensity with interferometric lithography. Nanoscale Adv. 2023;5(7):2045–53.10.1039/D2NA00570K ↗
20. Sasidharan V, Neumann A, Brueck SRJ. Diffraction-grating beam splitter, interferometric-lithography nanopatterning with a multilongitudinal-mode diode laser. J Vac Sci Technol B. 2021;39(6):062603.10.1116/6.0001377 ↗
21. Chen M, Wang Z, Ge X, Wang Z, Fujisawa K, Xia J, et al. Controlled fragmentation of single-atom-thick polycrystalline graphene. Matter . 2019;2(3):666–79.10.1016/j.matt.2019.11.004 ↗
22. Zhang C, Wu M, Li M, Che L, Tan Z, Guo D, et al. A nanonewton-scale biomimetic mechanosensor. Microsyst Nanoeng. 2023;9:87.10.1038/s41378-023-00560-w ↗
23. Zhang C, Wu M, Cao S, Liu M, Guo D, Kang Z, et al. Bioinspired environment-adaptable and ultrasensitive multifunctional electronic skin for human healthcare and robotic sensations. Small. 2023;19(41):e2304004.10.1002/smll.202304004 ↗
24. Namdari N, Mohammadian B, Jafari P, Mohammadi R, Sojoudi H, Ghasemi H, et al. Advanced functional surfaces through controlled damage and instabilities. Mater Horiz. 2020;7(2):366–96.10.1039/C9MH01516G ↗
25. Zhou Y, Zhan P, Ren M, Zheng G, Dai K, Mi L, et al. Significant stretchability enhancement of a crack-based strain sensor combined with high sensitivity and superior durability for motion monitoring. ACS Appl Mater Interfaces. 2019;11(7):7405–14.10.1021/acsami.8b20768 ↗
26. Zhang S, Liu H, Yang S, Shi X, Zhang D, Shan C, et al. Ultrasensitive and highly compressible piezoresistive sensor based on polyurethane sponge coated with a cracked cellulose nanofibril/silver nanowire layer. ACS Appl Mater Interfaces. 2019;11(11):10922–32.10.1021/acsami.9b00900 ↗
27. Chou SY. Sub-10 nm imprint lithography and applications. J Vac Sci Technol B: Microelectron Nanometer Struct. 1997;15(6):032002.10.1116/1.589752 ↗
28. Zhang L, Yan JW. Study on nano-graphitic carbon coating on Si mold insert for precision glass molding. Surf Coat Technol. 2022;448:128893.10.1016/j.surfcoat.2022.128893 ↗
29. Moon J, Kwon S, Alahbakhshi M, Lee Y, Cho K, Zakhidov A, et al. Surface energy-driven preferential grain growth of metal halide perovskites: effects of nanoimprint lithography beyond direct patterning. ACS Appl Mater Interfaces. 2021;13(4):5368–78.10.1021/acsami.0c17655 ↗
30. Cates N, Einck V, Micklow L, Morere J, Okoroanyanwu U, Watkins JJ, et al. Roll-to-roll nanoimprint lithography using a seamless cylindrical mold nanopatterned with a high-speed mastering process. Nanotechnology. 2021;32(15):155301.10.1088/1361-6528/abd9f1 ↗
31. Mizoshita N, Yamada Y, Murase M, Goto Y, Inagaki S. Direct nanoimprinting of nanoporous organosilica films consisting of covalently crosslinked photofunctional frameworks. Nanoscale. 2020;12(41):21146–54.10.1039/D0NR03272G ↗
32. Guo R, Yan G, Niu W, Li X. Fabrication of SU-8 polymer micro/nanoscale nozzle by hot embossing method. Nanotechnology. 2024;35(25):255301.10.1088/1361-6528/ad3252 ↗
33. Guo R, Li X, Niu W, Feng J. Oxygen plasma assisted room temperature bonding for manufacturing SU-8 polymer micro/nanoscale nozzle. Nanotechnol Rev. 2023;12(1):20230113.10.1515/ntrev-2023-0113 ↗
34. Rao J, Zou H, Syms RRA, Cheng E, Liu C. Fabrication of 2D silicon nano-mold based on sidewall transfer. Micro Nano Lett. 2011;6(1):29–33.10.1049/mnl.2010.0155 ↗
35. Yin Z, Qi L, Zou H, Sun L. A novel 2D silicon nano-mold fabrication technique for linear nanochannels over a 4 inch diameter substrate. Sci Rep. 2016;6:18921.10.1038/srep18921 ↗
36. Sun L, Zou H, Sang S. A low-cost and high-efficiency method for four-inch silicon nano-mold by proximity UV exposure. Nanotechnology. 2021;33(7):075303.10.1088/1361-6528/ac25ab ↗
37. Zhu X, Li Y, Shi Y, Hou L, Wang G, He Z, et al. Structure–mechanical property relationships of 3D-printed porous polydimethylsiloxane films. Nanotechnol Rev. 2023;12(1):20230188.10.1515/ntrev-2023-0188 ↗
38. He Z, Su J, Zhu X, Li Y, Yang L, Zhang X, et al. Integrated structure-function design of 3D-printed porous polydimethylsiloxane for superhydrophobic engineering. Rev Adv Mater Sci. 2024;63(1):20240074.10.1515/rams-2024-0074 ↗