Preparation of multilayer samples for scanning thermal microscopy examination

Abstract Thin film multilayer materials are very important for a variety of key technologies such as hard drive storage. However, their multilayered nature means it can be difficult to examine them after production and determining properties of individual layers is harder still. Here, methods of preparing multilayer samples for examination using scanning thermal microscopy are compared, showing that both a combination of mechanical and ion beam polishing, and ion beam milling to form a crater produce suitable surfaces for scanning thermal microscopy examination. However, the larger exposed surfaces of the ion beam milled crater are the most promising for distinguishing between the layers and comparison of their thermal transport properties.