Nano-positioning systems of nanometre accuracy and repeatability
Source abstract
Abstract
Abstract For positioning of moving elements at nanometre accuracy, it is necessary to provide guide systems with sub-nanometre scattering error for the transfer mechanism.
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Force Microscopy Techniques and Applications · Optical Coatings and Gratings · Surface and Thin Film Phenomena
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References
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