Nano-measuring systems of sub-namometre accuracy and resolution

Abstract In order to process a workpiece to namometre-order accuracy, measuring and control techniques of nanometre accuracy or better are essential. Nanotechnology must therefore be considered as an integrated technology of processing, measurement, and control. The measurement techniques used in connection with precision processing measure many characteristics of machined workpieces and machine tool components. The quantities measured are length, displacement, vibration, runout, figure, surface roughness, etc. The phenomena detected are sound, temperature, mechanical force, light, electromagnetic field, etc. Because of its widespread applications and present status, optical detection is the main theme here.