Nano-grating or one-dimensional scaling systems: diffraction gratings

Abstract The diffraction grating is a typical product for which nanotechnology plays a significant role in its fabrication and evaluation. It is an optical element with extremely fine parallel grooves on a flat or concave optical surface. The groove shape on a mechanically ruled grating is usually triangular, as shown in Fig. 4.l.l, and the spacing of the grooves u ranges from submicrometre to a few tens of micrometres, depending on the wavelength range in which the grating is to be used.