Preparation of Nanostructures

This chapter contains sections titled: Principles of Fabrication Subtractive and Additive Creation of Nanostructures Nanostructure Generation by Lift-off Processes Principles of Nanotechnical Shape-definition and Construction Nanomechanical Structure Generation Scaling Down of Mechanical Processing Techniques Local Mechanical Cutting Processes Surface Transport Methods Reshaping Processes Printing Processes Nanolithography Structure Transfer by Electromagnetic Radiation Nanolithographic Transfer of Groups of Elements by Optical Projection EUV and X-ray Lithography Multilayer Resists Techniques with Optical Pattern Transfer Near-field Optical Structure Techniques with Contact Masks Energetic Particles in Nanolithographic Structure Transfer Electron Beam Lithography Ion Beam Lithography Atomic Beam Lithography Molecular and Nanoparticle Beam Lithography Direct Writing of Structures by a Particle Beam Single-particle Beam Processes Nanofabrication by Self-structuring Masks Nanofabrication by Scanning Probe Techniques Scanning Force Probes Particle Manipulation With a Scanning Tunneling Microscope (STM) Thermo-mechanical Writing of Nanostructures Electrically Induced Structure Generation by Scanning Probe Techniques Chemical Electrodeless Induced Scanning Probe Structure Generation Nanostructure Generation by Optical Near-field Probes