Scanning Maxwell stress microscopy for UHV applications
Source abstract
Abstract
We have developed an easy-to-use electric force microscope for operation in an ultrahigh vacuum (UHV), based on the scanning Maxwell stress microscope (SMM) for surface science and nanoelectric device applications. The SMM head is built on an UHV flange, with all the optical parts placed on the air side. This design makes our UHV SMM as convenient a system as an instrument operated in air. The performance of UHV SMM is demonstrated for microfabricated silicon surfaces.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Force Microscopy Techniques and Applications · Near-Field Optical Microscopy · Advanced Surface Polishing Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (27)
Show source-provided references
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