journal article·2002-04-01

Submicrometre bridge electrode arrays for light emitting polymer diodes and photodiodes

Tobias Nyberg, Fengling Zhang, Olle Inganäs

Nanotechnology· Volume 13· Issue 2
Publisher page

Abstract

We have used a method of soft lithography, soft imprinting, to fabricate submicrometre structures to be used as light emitting polymer diodes and photodiodes. Using a silicone rubber replica (stamp) of an optical diffraction grating we transferred the grating pattern to an organic resist layer by placing the stamp in conformal contact with the resist. The transferred pattern was subsequently used as an etch mask for the processing of the device. This cheap and fast process, not limited by optical diffraction, was used to fabricate submicrometre structures over large areas, square millimetres. The structures were successfully utilized as light emitting diodes and photodiodes, with device characteristics influenced by the imposed structure.
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Research context

OpenAlex topics: Nanofabrication and Lithography Techniques · Organic Electronics and Photovoltaics · Advancements in Photolithography Techniques

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

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