High-pressure nanolithography using low-energy electrons from a scanning tunnelling microscope

We present a reproducible method of producing nanometre-size holes on a graphite surface with a high-pressure scanning tunnelling microscope. Holes were only observed at pressures above 5 bar with voltage pulses in the field-emission range (±4-10 V). The depth of the hole varied with the pressure while the observed diameter was independent of the applied pressure. The results obtained in the presence of elevated pressures of dry nitrogen, oxygen, and argon are presented.