Nanoanalysis by Atom Probe Tomography

Abstract Atom probe tomography is a most advanced microscopic analysis technique based on the principle of field ion microscopy. Atoms are individually desorbed from the specimen, identified and localized. From the measured data, the three‐dimensional atomic structure of nanometer‐sized specimens is reconstructed numerically. Significant improvements in the total volume of analysis, in the range of materials that can be investigated, and in specimen preparation have recently broadened the range of possible applications of this method decisively. In this chapter, the physical basis of this exciting nanoanalytical tool is presented in some detail, in order that the reader can appreciate the advantages and limitations of the method. The design of actual instruments is described, and the physics of field desorption and volume reconstruction algorithms are discussed. Application of the method to relevant problems of material physics in nanotechnology is illustrated with case studies.