Ultrafast voltage-contrast scanning probe microscopy

Although scanning probe microscopy is traditionally limited to slow temporal response, techniques utilizing nonlinear tip-to-sample interactions can be used to capture very fast temporal signals (voltages, in our case). Such SPM-based techniques may deliver unrivaled spatial and temporal resolution. We have developed a scanning force microscope probe for measuring ultrafast voltage signals with picosecond time resolution. Measurements of VLSI and MMIC devices are shown.