Magneto-optical microscopy as a favourite tool to probe focused ion beam patterning at low dose

A Ruotolo; S Wiebel; J P Jamet; N Vernier; D Pullini; J Gierak; J Ferré

doi:10.1088/0957-4484/17/13/038

journal article·2006-07-14

Magneto-optical microscopy as a favourite tool to probe focused ion beam patterning at low dose

A Ruotolo, S Wiebel, J P Jamet, N Vernier, D Pullini, J Gierak, J Ferré

Nanotechnology· Volume 17· Issue 13

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Source: openalex_inverted_index · Quality: short

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OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Ion-surface interactions and analysis · Advanced Electron Microscopy Techniques and Applications

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References (11)

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