A new approach to fabrication of nanostructures
Source abstract
Abstract
A new approach to the fabrication of model structures for nanoelectronics with characteristic sizes down to 10 nm is proposed. The approach consists in electron-beam-induced fabrication of self-supporting structures of nanometre sizes in a through slit formed in the substrate, followed by the deposition of a required material onto the structure, which serves as an active layer in a nanometre-scale device. Features of the fabrication steps are discussed. Bismuth nanobridges were fabricated and their voltage-current characteristics were measured, which demonstrated features of electron transport in these bridges connected with their small sizes and inner structures.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Semiconductor materials and devices · Semiconductor materials and interfaces · Surface and Thin Film Phenomena
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (24)
Show source-provided references
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