journal article·2016-02-05Open access

ALD—tooling up nanotechnology step by step

Anna Demming

Nanotechnology· Volume 27· Issue 5

Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

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Research context

OpenAlex topics: Supercapacitor Materials and Fabrication · Advanced battery technologies research · Fuel Cells and Related Materials

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (10)

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