ALD—tooling up nanotechnology step by step
Bibliographic record
Abstract
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Research context
OpenAlex topics: Supercapacitor Materials and Fabrication · Advanced battery technologies research · Fuel Cells and Related Materials
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References (10)
Show source-provided references
1. Ritala M · Nanotechnology · 1998 · 10 · 1910.1088/0957-4484/10/1/005 ↗
2. Wang B · Nanotechnology · 2014 · 25
3. Moitzheim S · Nanotechnology · 2014 · 2510.1088/0957-4484/25/50/504008 ↗
4. Liu J · Nanotechnology · 2015 · 26
5. Fiorentino G · Nanotechnology · 2015 · 2610.1088/0957-4484/26/6/064002 ↗
6. Li Z · Nanotechnology · 2014 · 25
7. Niu W · Nanotechnology · 2015 · 26
8. Cao Y-Q · Nanotechnology · 2015 · 26
9. Mackus A J M · Nanotechnology · 2015 · 27
10. Zhang Y · Nanotechnology · 2014 · 25