Phase shifting mask modulated laser patterning on graphene
Source abstract
Abstract
Abstract A one-step graphene patterning method is developed in this paper. A phase shifting mask is used to modulate incident laser beam spatially and generate graphene patterns by laser heating. Periodic graphene nanoribbon and nanomesh structures are fabricated by employing 1D and 2D phase shifting masks, respectively. The noncontact, simple procedure, easy handling and economic properties of this method make it promising towards graphene-based device fabrication.
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Research context
OpenAlex topics: Graphene research and applications · Laser-Ablation Synthesis of Nanoparticles · Diamond and Carbon-based Materials Research
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Zhejiang University of Technology
Nanjing University
Funding
National Basic Research Program of China · Zhejiang Natural Science Foundation for Youth · NSFJS · National Nature Science Foundation of China · Educational Commission of Zhejiang Province of China
References (30)
Show source-provided references
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