journal article·2005-06-01

Two-photon lithography of nanorods in SU-8 photoresist

Saulius Juodkazis, Vygantas Mizeikis, Kock Khuen Seet, Masafumi Miwa, Hiroaki Misawa

Nanotechnology· Volume 16· Issue 6
Publisher page

Abstract

Studies on two-photon lithography in negative SU-8 photoresist demonstrate the possibility of obtaining mechanically stable, stress-free, extended nanorods having lateral sizes of about 30 nm (corresponding to λ/25 resolution). The high resolution achievable with the given combination of materials and fabrication techniques demonstrates its potential for the fabrication of large-scale nanostructures, such as photonic crystals with photonic stop gaps at visible wavelengths.
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Research context

OpenAlex topics: Nonlinear Optical Materials Studies · Nanofabrication and Lithography Techniques · Photonic Crystals and Applications

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