Correction: Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process

Yingying Li; Elliott Worsey; Simon J. Bleiker; Pierre Edinger; Mukesh Kumar Kulsreshath; Qi Tang; Alain Yuji Takabayashi; Niels Quack; Peter Verheyen; Wim Bogaerts; Kristinn B. Gylfason; Dinesh Pamunuwa; Frank Niklaus

doi:10.1039/d3nr90214e

journal article·2023Open access

Correction: Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process

Yingying Li, Elliott Worsey, Simon J. Bleiker, Pierre Edinger, Mukesh Kumar Kulsreshath, Qi Tang, Alain Yuji Takabayashi, Niels Quack, Peter Verheyen, Wim Bogaerts, Kristinn B. Gylfason, Dinesh Pamunuwa, Frank Niklaus

Nanoscale· Volume 15· Issue 46

Publisher page Open full text

Source abstract

Abstract

Correction for ‘Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process’ by Yingying Li et al. , Nanoscale , 2023, https://doi.org/10.1039/d3nr03429a.

Only a short abstract or summary was supplied by the source.

Source: crossref · Quality: short

Research context

Nanomaterials

OpenAlex topics: Anodic Oxide Films and Nanostructures · Nanoporous metals and alloys · Advanced Surface Polishing Techniques

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

KTH Royal Institute of Technology, 11428 Stockholm, Sweden

University of Bristol, BS8 1UB Bristol, UK

École Polytechnique Fédérale de Lausanne (EPFL), 1015 Lausanne, Switzerland

IMEC, 3001 Leuven, Belgium

Ghent University, 9052 Gent, Belgium

Funding

H2020 European Institute of Innovation and Technology

References

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