journal article·1984

150. Interfacial electrical properties of amorphous, d.c. sputter-deposited carbon films on crystalline silicon

A.Azim Khan, John A Woollam, Chung Yun

Carbon· Volume 22· Issue 2
Publisher page

Abstract

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Research context

OpenAlex topics: Diamond and Carbon-based Materials Research · Lubricants and Their Additives · Copper Interconnects and Reliability

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