Directional elastic wave propagation in high-aspect-ratio photoresist gratings: liquid infiltration and aging
Abstract
Research context
OpenAlex topics: Force Microscopy Techniques and Applications · Near-Field Optical Microscopy · Advanced MEMS and NEMS Technologies
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Affiliations
Max Planck Institute for Polymer Research
55128 Mainz
Germany
Institut d'Electronique
de Microélectronique et de Nanotechnologie (IEMN)
UMR-CNRS 8520
59655 Villeneuve d'Ascq
France
Department of Materials Science and Engineering
University of Pennsylvania
Philadelphia
USA
Catalan Institute of Nanoscience and Nanotechnology (ICN2)
CSIC and the Barcelona Institute of Science and Technology
08193 Bellaterra
Spain
ICREA
Department of Materials Science
University of Crete and IESL/FORTH
Funding
European Research Council · Alexander von Humboldt-Stiftung