Incorporation-limiting mechanisms during nitrogenation of monolayer graphene films in nitrogen flowing afterglows

(A) metastable species. In such conditions, X-ray photoelectron spectroscopy reveals that the nitrogen incorporation (either as pyridine, pyrrole, or quaternary moieties) does not simply increase with the fluence of plasma-generated N atoms but is also linked to the damage generation. Based on these findings, a surface reaction model for monolayer graphene nitrogenation is proposed. It is shown that the nitrogen incorporation is first limited by the plasma-induced formation of defect sites at low damage and then by the adsorption of nitrogen atoms at high damage.