Diblock copolymer pattern protection by silver cluster reinforcement
Source abstract
Abstract
Pattern fabrication by self-assembly of diblock copolymers is of significant interest due to the simplicity in fabricating complex structures. In particular, polystyrene-block-poly-4-vinylpyridine (PS-b-P4VP) is a fascinating base material as it forms an ordered micellar structure on silicon surfaces. In this work, silver (Ag) is applied using direct current magnetron sputter deposition and high-power impulse magnetron sputter deposition on an ordered micellar PS-b-P4VP layer. The fabricated hybrid materials are structurally analyzed by field emission scanning electron microscopy, atomic force microscopy, and grazing incidence small angle X-ray scattering. When applying simple aqueous posttreatment, the pattern is stable and reinforced by Ag clusters, making micellar PS-b-P4VP ordered layers ideal candidates for lithography.
Source: europepmc · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Block Copolymer Self-Assembly · Surfactants and Colloidal Systems · Gold and Silver Nanoparticles Synthesis and Applications
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Deutsches Elektronen-Synchrotron DESY, Notkestr. 85, 22607 Hamburg, Germany
Technical University of Munich, TUM School of Natural Sciences, Department of Physics, Chair for Functional Materials, James-Franck-Str. 1, 85748 Garching, Germany
Chair for Multicomponent Materials, Department of Materials Science, Faculty of Engineering, Christian-Albrechts Universität zu Kiel, Kaiserstr. 2, 24143 Kiel, Germany
Centre for X-ray and Nano Science CXNS, Deutsches Elektronen-Synchtrotron DESY, Notkestr. 85, 22607 Hamburg, Germany
Department of Physics, University of Hamburg, Notkestr. 9-11, 22607 Hamburg, Germany
Heinz Maier-Leibnitz Zentrum (MLZ), Technische Universität München, Lichtenbergerstraße 1, 85748 Garching, Germany
KTH Royal Institute of Technology, Teknikringen 56-58, 100 44 Stockholm, Sweden
Funding
Helmholtz-Gemeinschaft · Deutsche Forschungsgemeinschaft
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