journal article·2019

High-quality graphene transfer via directional etching of metal substrates

Xuewei Zhang, Zehao Wu, Haoran Zheng, Qiancheng Ren, Zhenxing Zou, Le Mei, Zilong Zhang, Yang Xia, Cheng-Te Lin, Pei Zhao, Hongtao Wang

Nanoscale· Volume 11· Issue 34
Publisher page

Abstract

Large-scale applications of graphene require its high-efficiency transfer from growth metal substrates to any other substrates of interest. The wrinkles and folds generated during the transfer process of graphene by the well-known poly(methyl methacrylate) (PMMA)-assisted technique is a critical issue. Here, we report an improvement of this method by applying a directional etching process for the removal of the growth Cu substrates, using a pair of electrodes inserted into the etchant with a constant current to form an electrochemical system. The controlled redox reactions between the Cu and the solution environment result in the etching of Cu in a part-by-part manner strictly from one end to the other. The consistency of the Cu etching direction can avoid the formation of an easily destroyable Cu structure and release the stress concentration that is usually generated during the random etching process, and finally yield significantly improved quality of the transferred graphene film with a lowered density of wrinkles, cracks/folds, adlayers, reduced root-mean-square of surface roughness, and increased performance in sheet resistance and carrier mobility.
Source: openalex_inverted_index · Quality: candidate unverified · Source record ↗

Research context

OpenAlex topics: Graphene research and applications · Graphene and Nanomaterials Applications · Semiconductor materials and devices

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Center for X-Mechanics and Institute of Applied Mechanics

Zhejiang University

Hangzhou 310012

P. R. China

Institute of Microelectronics

Chinese Academy of Sciences

Beijing 100029

Key Laboratory of Marine Materials and Related Technologies

Ningbo Institute of Materials Technology and Engineering

Ningbo 315201

Funding

National Key Scientific Instrument and Equipment Development Projects of China · National Natural Science Foundation of China

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