journal article·2017

Nanostructure nitride light emitting diodes via the Talbot effect using improved colloidal photolithography

Liancheng Wang, Zhiqiang Liu, Zhi Li, Yiyun Zhang, Hongjian Li, Xiaoyan Yi, Junxi Wang, Guohong Wang, Jinmin Li

Nanoscale· Volume 9· Issue 21
Publisher page

Abstract

We report here a new approach of Talbot effect based colloidal photolithography for fabricating nanostructure light emitting diodes (LEDs). By employing a rigid metal nanohole array template (RDT) as the diffraction grating and a polysiloxane-based spin on dielectric (SOD) as the thickness-controllable spacer layer, various InGaN/GaN nanostructure LEDs have been fabricated. Three-dimensional finite-difference time-domain (3D-FDTD) simulations have been conducted to verify the proposed approach. Photoluminescence (PL) and time-resolved photoluminescence (TRPL) have been performed to investigate the optical properties of the obtained nanostructure LEDs. Our report shows significance in fabricating two dimensional (2D) functional nanostructures and understanding the optical properties of various nanostructure InGaN/GaN LEDs.
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Research context

OpenAlex topics: Photonic Crystals and Applications · Nanomaterials and Printing Technologies · Nanofabrication and Lithography Techniques

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

College of Mechanical and Electrical Engineering, Central South University, Changsha, Hunan, 410083, China

Semiconductor Lighting Technology and Development Center, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

Mind Star (Beijing) Technology Co. Ltd., Zhongguancun South Street, Haidian District, No. 45 Hing Fat Building 1001, Beijing 100872, China

College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 101408, China

Department of Materials Science and Engineering, University of California, Santa Barbara, Santa Barbara, California 93106, USA

Funding

National Key Research and Development Program of China · National Natural Science Foundation of China

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