In-situ Correlative Analysis of Electrical and Mechanical Properties of 3D Nanostructures by Combination of AFM, SEM and FIB
Source abstract
Abstract
Christian Schwalb, Pinar Frank, Stefan Hummel, Juergen Sattelkov, Robert Winkler, Johanna Huetner, Oleg Domanov, Georg Fantner, Harald Plank; In-situ Corre
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Force Microscopy Techniques and Applications · Integrated Circuits and Semiconductor Failure Analysis · Advanced Surface Polishing Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (4)
Show source-provided references
1. 10.1038/srep1639310.1038/srep16393 ↗
2. 10.1063/1.498331710.1063/1.4983317 ↗
3. Yablon · Microscopy and Analysis · 2017 · 31 · 14
4. Plank · Micromachines · 2020 · 11