Tungsten Probe Tip Cleaning
Source abstract
Abstract
Jehan Saujauddin, Tim Niemi, Ted Lundquist, Baohua Niu, Michael Cable; Tungsten Probe Tip Cleaning, Microscopy and Microanalysis, Volume 26, Issue S2, 1 Au
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Advanced Electron Microscopy Techniques and Applications · Electron and X-Ray Spectroscopy Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (3)
Show source-provided references
1. [3] Qiu, A , Lowe, W , Arora, M , Nanoprobing on 7 nm FinFET Devices in an SRAM Array: Challenges and Solutions, 45th ASM-ISTFA 2019 Proceedings.10.31399/asm.cp.istfa2019p0329 ↗
2. [1] Jehan Saujauddin, N. , Chen, E.P.Y. , Beaudoin, F , Nanoprobing Beyond 14nm with Latest Generation SEM-based Nano-probes, 43rd ASM-ISTFA 2017 Proceedings.10.31399/asm.cp.istfa2017p0464 ↗
3. [2] von Haartman, M. , Rahman, S. , Ganguly, S. , Verma, J. , Umair, A. , Deborde, T. , Optical Fault Isolation and Nanoprobing Techniques for the10 nm Technology Node and Beyond, 41st ASM-ISTFA 2015 Proceedings.10.31399/asm.cp.istfa2015p0052 ↗