A New Generation Plasma FIB Column with Higher Probe Current and Improved Imaging Resolution
Source abstract
Abstract
Tomáš Hrnčíř, Dušan Nešpor, Zsolt Radi, Jaroslav Jiruše, Lukáš Hladík, Olivier Salord, Anne Delobbe; A New Generation Plasma FIB Column with Higher Probe C
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Advanced Materials Characterization Techniques · Surface and Thin Film Phenomena · Advanced Electron Microscopy Techniques and Applications
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References (8)
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1. Precision Xe Plasma FIB Delayering for Physical Failure Analysis of sub-20 nm Microprocessor Devices; ISTFA
2. How Xe and Ga FIB differ in inducing lateral damage on TEM samples; ISTFA
3. Fast and Precise 3D Tomography of TSV By Using Xe Plasma FIB; ISTFA
4. ; Cross Section Analysis of Cu Filled TSVs Based On High Throughput Plasma-FIB Milling; ISTFA
5. How to achieve artefact-free FIB milling on polyimide packages; ISTFA
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8. ; Novel plasma FIB/SEM for high speed failure analysis and real time imaging of large volume removal; ISTFA: