The Resolution of the SEM

Abstract The resolution of any microscope is usually taken as the benchmark of its quality. When thinking about the scanning electron microscope(SEM) a comparison of its resolution to the resolutions quot-ed for other comparable instruments such as the transmission EM or the scanning tunneling micro-scope has unfortunately led some users to the view that the SEM is only a second best choice. In fact the spatial resolution that can be anticipated for an optimized SEM is highly competitive with its peers making it clearly the microscopy of choice. The resolution of the SEM depends on two classes of factors; those which are inherent to the use of electrons as an imaging tool, and those which relate to the performance of the instrumentation (and possibly of the operator) used to perform the microscopy. The use of electrons as the scanning probe, and the choice of secondary electrons as the usual imaging mode, potentially affects the achievable resolution in three ways.