Experiments in Astigmatism Detection and Correction Techniques for the SEM
Source abstract
Abstract
Richard Roebuck, Bernard Breton, David Holburn, Nicholas Caldwell; Experiments in Astigmatism Detection and Correction Techniques for the SEM, Microscopy a
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Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advancements in Photolithography Techniques · Non-Destructive Testing Techniques
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References (7)
Show source-provided references
1. 10.1063/1.500968310.1063/1.5009683 ↗
2. [7] SmartSEM™ is a trademark of Carl Zeiss Microscopy. This research was supported by funding from Carl Zeiss Microscopy and the in-kind support of the first author by BT plc. The authors gratefully acknowledge the assistance of Carl Zeiss personnel in undertaking this research.
3. 10.1017/S143192761300586210.1017/S1431927613005862 ↗
4. Goldstein · 2003
5. 10.1111/j.1365-2818.1982.tb00412.x10.1111/j.1365-2818.1982.tb00412.x ↗
6. [2] Ong, K.H. , Phang, J.C.H. and Thong, J.T.L. , (1997), Scanning, 19, p. 553
7. [5] Batten, C.F. (2000). Autofocusing and Astigmatism Correction in the Scanning Electron Microscope, MPhil Thesis, University of Cambridge