Surface imaging with UHV SLEEM and SEM LEEM
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Integrated Circuits and Semiconductor Failure Analysis · Advancements in Photolithography Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (5)
Show source-provided references
1. www.delong.cz
2. 10.1016/S1076-5670(03)80066-610.1016/S1076-5670(03)80066-6 ↗
3. Bauer · Low Energy Electron Microscopy · 2014
4. www.isibrno.cz
5. The authors acknowledge funding from the Technology Agency of the Czech Republic (Competence center: Electron microscopy, no: TE01020118).