Effect of Metal-Assisted Catalytic Etching (MACE) on Single-Crystal Si Wafers With Faceted Macropores
Source abstract
Abstract
Alexis T Ernst, Kurt W Kolasinski, Bret A Unger, Mark Aindow; Effect of Metal-Assisted Catalytic Etching (MACE) on Single-Crystal Si Wafers With Faceted Ma
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Semiconductor materials and devices · Silicon Nanostructures and Photoluminescence · Semiconductor materials and interfaces
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References (7)
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1. The microscopy studies were performed in the UConn / Thermo Fisher Scientific Center for Advanced Microscopy and Materials Analysis (CAMMA).
2. 10.3389/fchem.2018.0065110.3389/fchem.2018.00651 ↗
3. 10.1016/j.electacta.2008.03.00910.1016/j.electacta.2008.03.009 ↗
4. 10.1021/cr500177a10.1021/cr500177a ↗
5. Funding was provided by NSF Grant #1825331, West Chester University, and the resources of the Center for Microanalysis and Imaging Research and Training (CMIRT)
6. 10.1016/j.cossms.2011.11.00210.1016/j.cossms.2011.11.002 ↗
7. 10.1002/adfm.20100036010.1002/adfm.201000360 ↗