journal article·2019-08Open access

Secondary-Electron Electron-Beam-Induced Current Measurements at Lattice Resolution

Matthew Mecklenburg, William A. Hubbard, Jared J. Lodico, B. C. Regan

Microscopy and Microanalysis· Volume 25· Issue S2

Abstract

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Research context

OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advanced Electron Microscopy Techniques and Applications · Advancements in Photolithography Techniques

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References (4)

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1. 10.1038/nmat253210.1038/nmat2532 ↗
2. This work was supported by National Science Foundation (NSF) Science and Technology Center (STC) award DMR-1548924 (STROBE), and by NSF award DMR-1611036. Work at the Molecular Foundry was supported by the Office of Science, Office of Basic Energy Sciences, of the U.S. Department of Energy under Contract No. DE-AC02-05CH11231.
3. 10.1103/PhysRevApplied.10.04406610.1103/PhysRevApplied.10.044066 ↗
4. 10.1103/PhysRev.108.110.1103/PhysRev.108.1 ↗