Surface Analysis of Polymers using Helium Ion Microscopy Coupled with Secondary Ion Mass Spectrometry (HIM-SIMS)
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Abstract
Journal Article Surface Analysis of Polymers using Helium Ion Microscopy Coupled with Secondary Ion Mass Spectrometry (HIM-SIMS) Get access Artem A Trofimov, Artem A Trofimov Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, USAThe Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN, USA Search for other works by this author on: Oxford Academic Google Scholar Matthias Lorenz, Matthias Lorenz Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, USAThe Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN, USA Search for other works by this author on: Oxford Academic Google Scholar Anton Ievlev, Anton Ievlev Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, USAThe Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN, USA Search for other works by this author on: Oxford Academic Google Scholar Stephen T King, Stephen T King Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, USAThe Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN, USA Search for other works by this author on: Oxford Academic Google Scholar Olga S Ovchinnikova, Olga S Ovchinnikova Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, USAThe Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN, USA Search for other works by this author on: Oxford Academic Google Scholar Alex Belianinov Alex Belianinov Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, USAThe Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN, USA Corresponding author: belianinova@ornl.gov Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 25, Issue S2, 1 August 2019, Pages 868–869, https://doi.org/10.1017/S1431927619005075 Published: 01 August 2019
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OpenAlex topics: Ion-surface interactions and analysis · Nanopore and Nanochannel Transport Studies · Integrated Circuits and Semiconductor Failure Analysis
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References (7)
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7. This research was supported by ExxonMobil Corporation and conducted at the Center for Nanophase Materials Sciences (CNMS), which is a DOE Office of Science User Facility. The authors acknowledge Drs. D. Abmayr, W. Lamberti, R. Colby, and S. Yakovlev from ExxonMobil Chemical Corporation for providing polymer samples and useful discussion.