journal article·2019-08Open access

Ion Induced Bidirectional Bending for Controlled Manipulation at Nanoscale

Vivek Garg, Rakesh G. Mote, Tsengming Chou, Amelia Liu, Alex De Marco, Bhaveshkumar Kamaliya, Shi Qiu, Jing Fu

Microscopy and Microanalysis· Volume 25· Issue S2

Abstract

Ion irradiation and implantation are used extensively for inducing functionalities and engineering of nanostructures for diverse applications in the nanotechnology domain. Nanostructures, under ion irradiations, exhibit distinct transformations in contrast to their bulk counterparts due to the nanostructure dimensions comparable to collision cascade. Tensile, compressive stresses can be developed in the lattice atoms under ion irradiations, inducing plastic deformation, which in turn can be used for controlled manipulation at nanoscale, thus providing opportunities for extended functionality and strain engineering of nanostructures. Silicon (Si) nanostructures, with a high index and large band gap, offer unique light-matter interactions for optical applications such as color filtering etc. [1],
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Research context

OpenAlex topics: Metal and Thin Film Mechanics · Ion-surface interactions and analysis · Advanced Surface Polishing Techniques

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References (4)

Show source-provided references
1. Garg · Weaving Nanostructures with Site-Specific Ion Induced Bidirectional Bending
2. 10.1017/S143192761800477410.1017/S1431927618004774 ↗
3. 10.1002/admt.20180010010.1002/admt.201800100 ↗
4. The work is financially supported by IITB-Monash Research Academy, the Australian Research Council (DP180103955), IRCC (Seed grant: Spons/ME/I14079-1/2014), IIT Bombay, and Tata Consultancy Services (TCS) research scholarship program. The authors acknowledge the use of facilities within the Monash Centre for Electron Microscopy (MCEM), and Melbourne Centre for Nanofabrication (MCN), Victorian Node of the Australian National Fabrication Facility (ANFF).