Energy Filtered Transmission Electron Microscopy (EFTEM) and the use of Image-Spectroscopy

The increasing availability of both post-column energy filters, such as the Gatan Imaging Filter (GIF), and incolumn filters such as the -filter on JEOL and LEO instruments, has led to an increasing use of energyfiltered TEM (EFTEM) for the 2D compositional analysis of materials using elemental and jump-ratio maps. The advantage of EFTEM over energy-loss spectroscopy is one of speed of mapping, with a large area map obtained in just a few minutes. To achieve such rapid mapping, however, most spectral information is lost and routine analysis often produces artefacts through poor statistics and poor pre-edge background fitting.