A Method for Plan-View FIB Liftout of Near Surface Defects with Minimal Beam-Induced Damage
Source abstract
Abstract
Warren L York, Douglas L Medlin, Joshua D Sugar, Philip Noell; A Method for Plan-View FIB Liftout of Near Surface Defects with Minimal Beam-Induced Damage,
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Advanced Surface Polishing Techniques · Near-Field Optical Microscopy
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References (2)
Show source-provided references
1. 10.1016/S0968-4328(99)00005-010.1016/S0968-4328(99)00005-0 ↗
2. 10.1016/j.ultramic.2017.09.01110.1016/j.ultramic.2017.09.011 ↗