journal article·2018-08

Characterization of Si Surface by SEM-SXES using Low Incident Voltage

Yasuaki Yamamoto, Hideyuki Takahashi, Takanori Murano, Naoki Kikuchi, Natasha Erdman

Microscopy and Microanalysis· Volume 24· Issue S1
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Abstract

Yasuaki Yamamoto, Hideyuki Takahashi, Takanori Murano, Naoki Kikuchi, Natasha Erdman; Characterization of Si Surface by SEM-SXES using Low Incident Voltage
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short

Research context

OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advanced Electron Microscopy Techniques and Applications · Anodic Oxide Films and Nanostructures

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References (2)

Show source-provided references
1. 10.1093/jmicro/dfr07610.1093/jmicro/dfr076 ↗
2. Microscopy and Microanalysis · 2016 · 22 · 422