Low-Energy Argon Broad Ion Beam and Narrow Ion Beam Milling of In Situ Lift-Out FIB Specimens

M.J. Campin; C.S. Bonifacio; P.E. Fischione

doi:10.1017/s1431927618004804

journal article·2018-08Open access

Low-Energy Argon Broad Ion Beam and Narrow Ion Beam Milling of In Situ Lift-Out FIB Specimens

M.J. Campin, C.S. Bonifacio, P.E. Fischione

Microscopy and Microanalysis· Volume 24· Issue S1

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MJ Campin, CS Bonifacio, PE Fischione; Low-Energy Argon Broad Ion Beam and Narrow Ion Beam Milling of In Situ Lift-Out FIB Specimens, Microscopy and Microa

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OpenAlex topics: Advanced Materials Characterization Techniques · Integrated Circuits and Semiconductor Failure Analysis · Electron and X-Ray Spectroscopy Techniques

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