3D Nanostructures Grown via Focused Helium Ion Beam Induced Deposition

Matthew J. Burch; Anton Ievlev; Songkil Kim; Alex Belianinov; Olga S. Ovchinnikova; Michael G. Stanford; Kyle Mahady; Brett B. Lewis; Jason D. Fowlkes; Philip D. Rack

doi:10.1017/s1431927618002155

journal article·2018-08Open access

3D Nanostructures Grown via Focused Helium Ion Beam Induced Deposition

Matthew J. Burch, Anton Ievlev, Songkil Kim, Alex Belianinov, Olga S. Ovchinnikova, Michael G. Stanford, Kyle Mahady, Brett B. Lewis, Jason D. Fowlkes, Philip D. Rack

Microscopy and Microanalysis· Volume 24· Issue S1

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Abstract

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Research context

Nanomaterials Materials processing

OpenAlex topics: Metal and Thin Film Mechanics · Advanced Electron Microscopy Techniques and Applications · Ion-surface interactions and analysis

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References (6)

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