journal article·2018-08Open access

Time of Flight Backscatter and Secondary Ion Spectrometry in a Helium Ion Microscope

Nico Klingner, Gregor Hlawacek, Rene Heller, Johannes von Borany, Stefan Facsko

Microscopy and Microanalysis· Volume 24· Issue S1

Abstract

Nico Klingner, Gregor Hlawacek, Rene Heller, Johannes von Borany, Stefan Facsko; Time of Flight Backscatter and Secondary Ion Spectrometry in a Helium Ion
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short

Research context

OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advanced Electron Microscopy Techniques and Applications · X-ray Spectroscopy and Fluorescence Analysis

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References (3)

Show source-provided references
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2. 10.1016/j.ultramic.2015.12.00510.1016/j.ultramic.2015.12.005 ↗
3. 2014 · 32 · 020801