Voltage Contrast Imaging with Energy-Controlled Signal in an FE-SEM.
Source abstract
Abstract
Y Hashimoto, S Takeuchi, T Sunaoshi, Y Yamazawa; Voltage Contrast Imaging with Energy-Controlled Signal in an FE-SEM., Microscopy and Microanalysis, Volume
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Electron and X-Ray Spectroscopy Techniques · Anodic Oxide Films and Nanostructures
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References (3)
Show source-provided references
1. 10.1017/S143192760606708010.1017/S1431927606067080 ↗
2. J. Mater. Sci.: Mater. Electron · 2011 · 22 · 1523
3. 10.1017/S143192761005498X10.1017/S143192761005498X ↗