Defect Characterization using Transmission Scanning Electron Microscopy
Source abstract
Abstract
Patrick Callahan, Jean-Charles Stinville, Eric Yao, McLean P Echlin, Jungho Shin, Fulin Wang, Marc De Graef, Tresa M Pollock, Daniel S Gianola; Defect Char
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Electron and X-Ray Spectroscopy Techniques · Silicon and Solar Cell Technologies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (3)
Show source-provided references
1. 10.1016/j.ultramic.2017.11.00410.1016/j.ultramic.2017.11.004 ↗
2. 10.1016/j.ultramic.2011.07.00110.1016/j.ultramic.2011.07.001 ↗
3. Microscopy Today · 2017 · 25 · 12