Testing EDS performance in ESEM

Problems with EDS analysis in an environmental SEM (ESEM) are well known and are due to beam scattering and the creation of a so-called electron skirt. Analysis of homogeneous materials far from specimen's edges could provide agreeable results Proposed means Therefore, utilizing EDS with ESEM, the microscopist should be aware of possible artifacts. This work presents results of testing EDS (Prism, PGT, NJ, USA) performance in a field emission ESEM (XL30, FEI, OR, USA).